1. 위 상품은 파일다운로드 상품이며 다운로드는 마이강의실 < 학습자료실에서 확인하세요.
2. 3일동안만 횟수에 제한 없이 파일다운로드가 가능합니다.
3. 구매 후 취소가 불가한 상품입니다.
Figure 13 shows that cryo pump is cooling pump. It means this pump is cooling, liquefaction and store air, not pumping. Generally, it has 3 processes like condensation, absorption and trap at low temperature. The cooled air or molecules do not have any momentum so it is no possibility to heat any molecules. It means vacuum.
Cryo pump have High emission velocity and high emission capacity so it is possible for long time at 10-2 [Pa].
This pump is necessary for recycling process because it is air occlusion pump. It's also clean because of no use of oil
High vacuum pump is used for many parts like process of semiconductor, IC, nuclear fusion reactor and etcetera. Recently, high vacuum is especially used in aerospace industry and process of solar cell.
Ultra High Vacuum
Ultra high vacuum region is defined as the pressure lower than 10 to the minus 8.
Generally, there are three steps to make Ultra high vacuum (UHV), Roughing pump, High vacuum pump and Ultra high vacuum pump. After Roughing pump step, low vacuum state is caused. After High vacuum pump step, high vacuum state is caused. After Ultra high vacuum pump step, Ultra high vacuum state we want is caused. To make this process fast, using one High vacuum pump and one Ultra vacuum pump at the same time or using two of Ultra high vacuum pumps are Abstract
Vacuum Science and Technology
Ultra High Vacuum
Trend in semiconductor industry
 기초진공공학, 김현후, 내하출판사 2007
 한국표준과학연구원 진공기술센터
 진공과학입문, 정석민 외 2명
 KNU Engineering Display Skill-up School
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 주장헌, 김효배, 김중조, “반도체 산업에 있어서의 진공펌프 소비 전력 절감 방안”, 2008.7
 공성호교수님 물리전자 강의자료.